JPS626839U - - Google Patents

Info

Publication number
JPS626839U
JPS626839U JP9794585U JP9794585U JPS626839U JP S626839 U JPS626839 U JP S626839U JP 9794585 U JP9794585 U JP 9794585U JP 9794585 U JP9794585 U JP 9794585U JP S626839 U JPS626839 U JP S626839U
Authority
JP
Japan
Prior art keywords
photo
interpreters
flow rate
control device
gas flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9794585U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0341713Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9794585U priority Critical patent/JPH0341713Y2/ja
Publication of JPS626839U publication Critical patent/JPS626839U/ja
Application granted granted Critical
Publication of JPH0341713Y2 publication Critical patent/JPH0341713Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
  • Flow Control (AREA)
JP9794585U 1985-06-26 1985-06-26 Expired JPH0341713Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9794585U JPH0341713Y2 (en]) 1985-06-26 1985-06-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9794585U JPH0341713Y2 (en]) 1985-06-26 1985-06-26

Publications (2)

Publication Number Publication Date
JPS626839U true JPS626839U (en]) 1987-01-16
JPH0341713Y2 JPH0341713Y2 (en]) 1991-09-02

Family

ID=30965419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9794585U Expired JPH0341713Y2 (en]) 1985-06-26 1985-06-26

Country Status (1)

Country Link
JP (1) JPH0341713Y2 (en])

Also Published As

Publication number Publication date
JPH0341713Y2 (en]) 1991-09-02

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